MODEL: μCOATER
The Mutech μCoater is a compact and easy-to-use spin coater. It features an integrated vacuum system, including a vacuum chuck and pump, to hold the sample securely during spinning, eliminating the need for an external vacuum pump.
The instrument is constructed from steel and aluminum, with a polypropylene vacuum chuck. The interior of the spin bowl has a non-stick PTFE coating for easy cleaning. A high-quality outrunner brushless motor provides efficient operation and low static friction, helping extend the instrument’s service life.
SPIN COATING PROCESS
Spin coating is a method used to produce a thin, uniform film on a sample surface. First, a small amount of coating solution is dispensed onto the sample. The sample is then rotated at high speed to spread the solution evenly across its surface. This method is commonly used for photoresist coating in microchip fabrication or for depositing nanoparticle coatings.
TECHNICAL SPECIFICATIONS
| Parameter | Specification |
|---|---|
| Spin speed | 500–10,000 rpm |
| Acceleration | Up to 5,000 rpm/s |
| Maximum spin time | 1,000 seconds per step |
| Vacuum system | Built-in vacuum pump and vacuum chuck with adapters to accommodate various sample sizes |
| Memory | Stores 10 spin programs, each with up to 7 steps featuring individually adjustable speed, acceleration, and duration |
| Construction materials | Steel and aluminum body, PTFE-coated spin bowl, and glass lid |
OPTIONAL ACCESSORIES
In addition to the included accessories, Mutech offers additional adapters and custom accessories to meet customer requirements.
KEY FEATURES
- Integrated vacuum system holds the sample securely during spinning.
- Easy-to-use color display with control buttons.
- Durable brushless motor ensures stable operation.
- An 8 mm opening in the center of the glass lid allows easy dispensing of the coating solution during spinning.
- PTFE-coated spin bowl facilitates cleaning.
- Accommodates samples ranging from 5 × 5 mm to 4-inch wafers.
